Micro/Nano Technology Center

The University of Louisville's Cleanroom and Supporting Laboratories

Standard Operating Procedures (SOP's)

THERMAL

DEPOSITION


WET PROCESSES

DRY ETCH

PHOTOLITHOGRAPHY

If you would like MNTC staff to make masks for you, go to louisvillephotomasks.com

Photolithography Processes

Photoresist and Developer Data Sheets

      METROLOGY

      OTHER PROCESSES