Thin Film Stress Measurement
A Toho thin film stress measurement system using non-contact multi-wavelength surface flatness techniques for evaluating thin film stresses from room temperature to 500°C.
3-D Contact Profiling
A Veeco contact profilometer that can provide down to a 7.5-angstrom step height measurement with a vertical range up to 1 mm and a maximum scan length of 200 mm. The low stylus force allows scratch-free measurement of soft materials.
Non-contact 3D Optical Profiler
A Zygo non-contact profilometer that is capable of measuring surface topology of microscale systems. Its capabilities include a field stitching and a dynamic module for measuring MEMS devices during actuation.
Testing
Veeco FPP-5000 Four-point Probe and suite of probe stations and electronic test instruments for measuring sheet resistance, TCR, I-V curves, C-V curves and device performance.
Thin Film Measurement System
Filmetrics system for non-contact thin film thickness measurements and determining optical constants of single and multilayer films.
Ellipsometry
VASE Woollam Variable Angle Spectroscopic Ellipsometer for non-contact thin film thickness measurements and determining optical constants of single and multilayer films.
Goniometer / Optical Tensiometer
Attention Theta Lite by Biolin Scientific is a compact and accurate contact angle meter for simple measurements. Measurements include: static contact angle with the sessile drop, captive bubble and meniscus methods, dynamic contact angle with the tilted drop and sessile drop methods, surface free energy, surface/interfacial tension with the pendant drop and reverse pendant drop methods, 3D surface roughness with the fringe projection phase shifting method, and interfacial dilatational rheology with the pulsating drop method.