The Micro/Nano Technology Center (MNTC) is utilized for both research and instructional purposes. The facility provides a state-of-the-art 10,000 ft2 cleanroom for teaching both fundamental and current fabrication techniques to manufacture integrated circuits (ICs), discrete microelectronic devices, microelectromechanical systems (MEMS), sensors and actuators and various electro-optic devices. The center also serves as an appropriate setting for technology transfer of information and projects.
Students are able to obtain valuable training in leading edge technologies in an appropriate setting for new research in micro and nanofabrication. The cleanroom houses a wide range of processing, packaging and test equipment for a wide range of disciplines. Specifically, the MNTC serves as a center for research activity in micromachined sensors and actuators, electro-optic devices, special-purpose microelectronic devices, planar waveguides, chemical transducers, microstrip and microgap radiation detectors, micromachined nozzles and micromachined ink-jet printheads.
The MNTC is utilized for the fabrication, packaging, and testing of various microelectronic devices and circuits, electro-optic devices, micromachined sensors and actuators and other MEMS devices and structures. Due to stringent processing requirements the cleanroom is designed to meet class 100 and 1000 specifications. Processes include: photolithography, oxidation, thermal diffusion, electron beam evaporation, sputtering, chemical vapor deposition (CVD), anisotropic and isotropic silicon dry etching, reactive ion etching (RIE), bulk and surface micromachining, substrate bonding, wire bonding, dicing, packaging, probe inspection, measurement and testing.
Development of the MNTC provided a quantum leap in education opportunities for students at the University of Louisville and the adjacent region. Research activities in the John W. Shumaker Research Building fit well with national interests in micro and nanofabrication as a strategic area of interest. It is clear these techniques and applications will continue to have an important impact upon technology. Graduate and undergraduate students exposed to micro and nanofabrication emerge with real experience in new technology and applications.