Microfabrication/MEMS Laboratory
The purpose of this laboratory is to provide a valuable hands-on laboratory cleanroom experience in the areas of microfabrication and MEMS technology. During the semester, a MEMS device will be designed, fabricated, packaged and tested using the MNTC’s resources.
For more details please refer to the ECE 544 Syllabus.
All students are required to undergo Safety Training to ensure a safe environment for all cleanroom users as well as pass the Safety Quiz before they are admitted to the cleanroom.
Lab Materials
- Lab 0 – Introduction, Orientation & Safety Training & Cleanroom Tour
- Lab 1 – Photolithography with Mask 1
- Lab 2 – Sputter Deposition & Liftoff
- Lab 3 – Photolithography with Mask 2
- Lab 4 – Dicing & XeF2 Etching
- Lab 5 – Device Packaging, Imaging & Testing
- Lab 6 – L-Edit Training and L-Edit Mask and L-Edit presentation