THERMAL
- Thermal Oxidation Furnace, Annealing Furnace, Diffusion Furnace *
- Rapid Thermal Processing (RTP) *
- Rapid Thermal Anneal (RTA) *
- YES Polyimide Vacuum Oven
- Vacuum Ovens
DEPOSITION
List of Available Deposition Materials
- Oxford PECVD Plasmalab 100 * PECVD Characterization Data here, PECVD Si3N4 Stress Control and Rate Data here
- Lesker PVD 75 Sputtering System * Sputtering Characterization Data here
- Lesker E-beam Evaporator *
- Molecular Vapor Deposition (MVD) *
- Technics 4604 Sputtering Machine *
- PEALD and ALD Beneq TFS-200 * ALD Characterization Data here
WET PROCESSES
- RCA Wafer Clean *
- Wet Benches *
- Aluminum Etch *
- Gold Etch *
- Silicon Dioxide Etch *
- Bulk Micromachining with KOH *
DRY ETCH
- HF Vapor Etch *
- March Reactive Ion Etching (RIE) *
- Axic HF-8 Barrel Asher *
- Deep Reactive Ion Etching (DRIE) *
- XACTIX XeF2 *
- Ion Milling (PVD 75) *
- Trion Metal Etcher *
PHOTOLITHOGRAPHY
- Photoresist Spin Coating * More useful information on Spin Coating Theory from https://www.costeffectiveequipment.com
- AB-M Mask Aligner *
- Suss Mask Aligner MA6/MA8 * User Manual for Suss Mask Aligner MA6/BA6
- Bottom Side Alignment using Suss Mask Aligner MA6/BA6 *
- Photoresist Development and Stripping *
- Lift-Off Procedure *
- Adhesion Promotion *
- Creating PDMS molds with SU8 Photoresist We recommend to use SU-8 Spin Calculator
- Vacuum Ovens *
- YES Vapor Prime & Image Reversal Vacuum Oven
METROLOGY / IMAGING
- Filmetrics Thin Film Measurement System *
- Ellipsometer VASE Series *
- Profilometer Veeco Dektak 8M *
- Veeco FPP-5000 4-Point Probe *
- Zygo Image Surface Profile *
- TOHO FLX-2320 Thin Film Measurement *
- Zeiss Axiotron Microscope *
- QFI Thermal Imaging System InfraScope *
- Goniometer from Biolin Scientific
- Asylum Research AFM *
- Quantax EDS Detector *
- SEM Sputter Coater *
- ThermoFisher Apreo C SEM SOP
- Hitachi HT-7700 TEM
- Toho Thin Film Stress Measurement System SOP