STS DRIE
This DRIE served the MNTC for a decade and is still in working order. The parts to repair are very difficult to find. We also have a spare chamber for the tool.
Pfeiffer HiCube 80 Eco Vacuum Pump
This Turbo pump has never been used.
Logitech CMP
This Chemical Mechanical Polisher is used to planarize wafers and ensure a smooth as possible surface.
Leybold Turbo Pump
This Leybold pump is in fair condition but does need a sensor to be replaced before it is in working order.
Veeco Nanoscope
This AFM is complete and operational but needs some software issues resolved before it is ready to perform again.
Obducat Nanoimprinter
This is a Nanoimprinter that has not been in use for 10 years.