Standard Operating Procedures — Micro/Nano Technology Center

Title	Type
Deposition Materials Lists	File
Mask Aligner MA6A6 extended SOP	File
Leitz Microscope SOP	File
SU8 Molds	File
FOMTraining.pdf	File
TrionAlandTietching.pdf	File
TrionAlAuTietching.pdf	File
PECVDSiliconNitrideStressControlandRateData.pdf	File
BallBonderShortCourse.pdf	File
AluminumPlasmaEtchSOP.pdf	File
Furnaces_SOP.pdf	File
PECVD_SOP.pdf	File
PVD75_SOP.pdf	File
Ebeam_SOP.pdf	File
MVD_SOP.pdf	File
Technics_SOP.pdf	File
RCAclean_SOP.pdf	File
Xactix_SOP.pdf	File
Trion_SOP.pdf	File
VASE_SOP.pdf	File
Dektak8M_SOP.pdf	File
Zygo_SOP.pdf	File
Toho_SOP.pdf	File
SEM_Coater_SOP.pdf	File
CPD_SOP.pdf	File
SussAligner_SOP.pdf	File
SussBSA_SOP.pdf	File
PRdevelop_removal_SOP.pdf	File
ABMaligner_SOP.pdf	File
Liftoff_SOP.pdf	File
VacuumOvens_SOP.pdf	File
AdhesionPromotion_SOP.pdf	File
RTP_SOP.pdf	File
IonMilling_SOP.pdf	File
WetBench_SOP.pdf	File
FOM_SOP.pdf	File
PRcoating_SOP.pdf	File
SpinTheory.pdf	File
SussBonder_SOP.pdf	File
HFvaporEtcher_SOP.pdf	File
AlWetEtch_SOP.pdf	File
AuWetEtch_SOP.pdf	File
SiO2WetEtch_SOP.pdf	File
KOH_SOP.pdf	File
HF8Asher_SOP.pdf	File
FPP_SOP.pdf	File
HitachiSEM_SOP.pdf	File
AsylumAFM_SOP.pdf	File
EDSBruker_SOP.pdf	File
PDMSSpinner_SOP.pdf	File
FCB_SOP.pdf	File
Filmetrics_SOP.pdf	File
Parylene_SOP.pdf	File
QFI_SOP.pdf	File
RTA_SOP.pdf	File
DRIE_SOP.pdf	File
ZeissAxioskopMicroscope_SOP.pdf	File
MarchRIESOP.pdf	File
EDXBruker.pdf	File
LN2 Fill for Open Top Vessels (Not for Dewars)	File
Toho Thin Film Stress Measurement System	File
YES Polyimide Vacuum Oven SOP	File
YES Image Reversal & Vapor Prime Vacuum Oven	File
LN2 Fill Process for Dewars SOP	File
ApreoSEMSOP.pdf	File
HitachiHT7700TEMSOP.pdf	File
PVD 75 Characterization Data	File
Hitachi HT7700 TEM SOP	File
March RIE June 2022	File
Goniometer	File
Hitachi 7700 TEM	File
ApreoSEMSOPn.pdf	File
PEALD and ALD SOP	File