AluminumPlasmaEtchSOP.pdf — Micro/Nano Technology Center

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Micro/Nano Technology Center

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- Wafer Thermal Processing
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- Etching, Machining, & Bonding
- Packaging
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- How to Become a User
- FOM- Facility Online Manager
- Standard Operating Procedures (SOP's)
- Characterization Data
- Dicing Request
- Photomask Request
- Cleanroom Safety Guidelines
- SDS Database
- L-Edit design
- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
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PDF document icon Aluminum Plasma Etch SOP.pdf — PDF document, 594 KB (608567 bytes)

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