Ebeam_SOP.pdf — Micro/Nano Technology Center

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Micro/Nano Technology Center

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- Characterization Data
- Dicing Request
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- SDS Database
- L-Edit design
- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
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PDF document icon E-beam_SOP.pdf — PDF document, 483 KB (494594 bytes)

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