p8545pv_phosphorous.pdf — Micro/Nano Technology Center

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Micro/Nano Technology Center

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- Characterization Data
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- L-Edit design
- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
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ECE 544 Microfabrication/MEMS Laboratory
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PDF document icon p8545pv_phosphorous.pdf — PDF document, 39 KB (40773 bytes)

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