NitrousOxide.pdf — Micro/Nano Technology Center

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Micro/Nano Technology Center

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- Etching, Machining, & Bonding
- Packaging
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- FOM- Facility Online Manager
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- Characterization Data
- Dicing Request
- Photomask Request
- Cleanroom Safety Guidelines
- SDS Database
- L-Edit design
- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
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ECE 544 Microfabrication/MEMS Laboratory
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PDF document icon Nitrous Oxide.pdf — PDF document, 141 KB (144810 bytes)

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