CHF3HalocarbonR23.pdf — Micro/Nano Technology Center

Skip to Content

louisville.edu
My Accounts

louisville.edu
My Accounts

All Sites
This Site

Search Query

Go

Apply
- Undergraduate
- Transfer
- Graduate
- Dentistry
- Law
- Medicine
- MBA
- International
- Online Learning
Donate
Campuses
- Belknap
- HSC
- Online

Micro/Nano Technology Center

Home
About Us
- Administration and Staff
- Annual Reports
About UsAbout Us Dropdown Toggle
- Administration and Staff
- Annual Reports
Capabilities & Equipment
- Photolithography
- Wafer Thermal Processing
- Testing & Characterization
- Etching, Machining, & Bonding
- Packaging
- Electron Microscopy & Imaging
Capabilities & EquipmentCapabilities & Equipment Dropdown Toggle
- Photolithography
- Wafer Thermal Processing
- Testing & Characterization
- Etching, Machining, & Bonding
- Packaging
- Electron Microscopy & Imaging
How to Become a User
User Information
- How to Become a User
- FOM- Facility Online Manager
- Standard Operating Procedures (SOP's)
- Characterization Data
- Dicing Request
- Photomask Request
- Cleanroom Safety Guidelines
- SDS Database
- L-Edit design
- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
User InformationUser Information Dropdown Toggle
- How to Become a User
- FOM- Facility Online Manager
- Standard Operating Procedures (SOP's)
- Characterization Data
- Dicing Request
- Photomask Request
- Cleanroom Safety Guidelines
- SDS Database
- L-Edit design
- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
What Does It Cost?
- MNTC Rates Effective 6-1-2023
What Does It Cost?What Does It Cost? Dropdown Toggle
- MNTC Rates Effective 6-1-2023
Pay My Bill
Contact Us
- Inquiry form
Contact UsContact Us Dropdown Toggle
- Inquiry form
Self - Guided Tour
ECE 544 Microfabrication/MEMS Laboratory
Files
- Documents
FilesFiles Dropdown Toggle
- Documents

PDF document icon CHF3 (Halocarbon R23).pdf — PDF document, 113 KB (116561 bytes)

© University of Louisville

Contact
Privacy Statement
Apply
- Undergraduate
- Transfer
- Graduate
- Dentistry
- Law
- Medicine
- MBA
- International
- Online Learning
Jobs
Donate
Emergency

Login

Privacy Statement

Apply

Undergraduate
Transfer
Graduate
Dentistry
Law
Medicine
MBA
International
Online Learning

Campuses

Belknap
HSC
Online

Login

Email
ULink
WorkdayHR
PeopleSoft HR
PeopleSoft Campus Solutions
PeopleSoft Financials
Blackboard
Business Ops
CardSmart
CardBox
Cardinal Careers
Plone

© University of Louisville