AluminumOxide.pdf — Micro/Nano Technology Center

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Micro/Nano Technology Center

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- Characterization Data
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- Cleanroom Safety Guidelines
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- L-Edit design
- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
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PDF document icon Aluminum-Oxide.pdf — PDF document, 88 KB (90151 bytes)

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