PECVDCharacterizationData.pdf — Micro/Nano Technology Center

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Micro/Nano Technology Center

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- Photolithography
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- Testing & Characterization
- Etching, Machining, & Bonding
- Packaging
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- Photoresist Profiles for DRIE S1827 and AZ4620
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- Photoresist Profiles for DRIE S1827 and AZ4620
- PEALD and ALD SOP
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PDF document icon PECVD Characterization Data.pdf — PDF document, 173 KB (177926 bytes)

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