User Information
Use the following information for Standard Operating Procedures and any available reference data on processes. If the data you are looking for is not available on this page, please contact MNTC directly and we will do our best to help you.
Standard operating procedures in the MNTC
- RCA Wafer Clean [PDF]
- Wet Benches [PDF]
- Aluminum Etch [PDF]
- Gold Etch [PDF]
- Silicon Dioxide Etch [PDF]
- Bulk Micromachining with KOH [PDF]
- InP/InGaAs Wet Etch [PDF]
- HF Vapor Etch [PDF]
- March Reactive Ion Etching (RIE) [PDF]
- Axic HF-8 Barrel Asher [PDF]
- STS Deep Reactive Ion Etching (DRIE) [PDF]
- Oxford Astrelas DRIE [PDF]
- XACTIX XeF2 [PDF]
- Ion Milling (PVD 75) [PDF]
- Trion Metal Etcher [PDF]
- Photoresist Spin Coating [PDF]
- AB-M Mask Aligner [PDF]
- Suss Mask Aligner MA6/MA8 [PDF]
- Bottom Side Alignment using Suss Mask Aligner MA6/BA6 [PDF]
- Photoresist Development and Stripping [PDF]
- Lift-Off Procedure [PDF]
- Adhesion Promotion [PDF]
- SU8 Photoresist [PDF]
- Vacuum Ovens [PDF]
- YES Vapor Prime & Image Reversal Vacuum Oven [PDF]
- Filmetrics Thin Film Measurement System [PDF]
- Ellipsometer VASE Series [PDF]
- Profilometer Veeco Dektak 8M [PDF]
- Veeco FPP-5000 4-Point Probe [PDF]
- Zygo Image Surface Profile [PDF]
- TOHO FLX-2320 Thin Film Measurement [PDF]
- Zeiss Axiotron Microscope [PDF]
- QFI Thermal Imaging System InfraScope [PDF]
- Goniometer from Biolin Scientific [PDF]
- Hitachi Bench Top SEM [PDF]
- Asylum Research AFM [PDF]
- Quantax EDS Detector [PDF]
- SEM Sputter Coater [PDF]
- ThermoFisher Apreo C SEM SOP [PDF]
- Hitachi HT-7700 TEM [PDF]
- Toho Thin Film Stress Measurement System SOP [PDF]
- Suss SB6e Bonder [PDF]
- Flip Chip Bonder Finetech [PDF]
- Parylene Deposition System PDS20210 Labcoter [PDF]
- Critical Point Dryer [PDF]
- PDMS Solitec 5100 Spinner [PDF]
- Ball / Wedge Bonding
- Ball Bonder Short Course [PDF]
- Liquid Nitrogen (LN2) fill for open top containers (not Dewars) [PDF]
- Liquid Nitrogen (LN2) fill process for Dewars [PDF]
Reference Data
Guides and reference data to help users in the cleanroom