Micro/Nano Technology Center

The University of Louisville's Cleanroom and Supporting Laboratories

Process Resources

  • Advanced Semiconductor Fundamentals, Second Edition, Vol. VI; Pierret, Robert F.
  • CRC Handbook of Laboratory Safety, Fifth Edition; Furr, A. Keith
  • Electronic Semiconductors; Spenke, Eberhard
  • Introduction to Microelectronic Fabrication, Vol. V; Jaeger, Richard C.
  • Low Cost Flip Chip Technologies; Lau, John H.
  • Microchip Fabrication, Third Edition; Van Zant, Peter
  • Microchip Fabrication: A Practical Guide to Semiconductor Processing; Van Zant, Peter
  • Microelectronic Circuit Design; Jaeger, Richard C. and Blalock, Travis N.
  • Micromechanics and MEMS; Trimmer, William S.
  • Microsystem Design; Senturia, Stephen D.
  • Midsize Facilities
  • Modular Series on Solid State Devices, Vol. II: The PN Junction Diode; Neudeck, Gerold W.
  • Modular Series on Solid State Devices, Vol. III: The Bipolar Junction Transistor; Neudeck, Gerold W.
  • Modular Series on Solid State Devices, Vol. IV: Field Effect Devices; Pierret, Robert F.
  • Physics of Semiconductor Devices; Shur, Michael
  • Physics Part I; Resnick, Robert and Halliday, David
  • Prudent Practices in the Laboratory: Handling and Disposal of Chemicals; National Research Council
  • Scanning Electron Microscopy and X-Ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists; Goldstein, Joseph I. et al.
  • Semiconductor Devices: Physics and Technology; Sze, S. M.
  • Semiconductor Fundamentals, Second Edition, Vol. I; Pierret, Robert F.
  • Semiconductor Processing; Gupta, D. C.
  • Silicon Micromachining; Elwenspoek, M. and Jansen, H.
  • Silicon Semiconductor Technology; Runyan, W. R.
  • Spreadsheet Tools for Engineers Using Excel; Gottfried, Byron S.
  • Springer Handbook of Nanotechnology; Bhushan, Bharat
  • Thin Film Processes; Vossen, John L. and Kern, Werner
  • VHDL for Programmable Logic; Skahill, Kevin
  • VLSI Technology, Second Edition; Sze, S. M.