Micro/Nano Technology Center

The University of Louisville's Cleanroom and Supporting Laboratories

Rates

University of Louisville

Micro/Nano Technology Center Rates (as of 09/02/2014) Download a pdf copy of MNTC Rates

Users of the MNTC will be charged a daily cleanroom access fee and an equipment processing fee appropriate for the process.  All users will be charged including faculty.

A) Daily Access Fee for the Cleanroom:

Internal User: $25

External User: $34

Access fees will be capped after 10 access events or a maximum of $250/month for internal users.  A cap is not instituted for external users.

B) Equipment Usage Fee:

Equipment and the processes associated with that tool are divided into 4 Groups, representative of the cost associated with the tool and materials used for that process. The usage rates are defined below for internal and external users.  A cap of $1,500 per month will be implemented for equipment usage, access fees and training for internal users only.  This cap does not include exceptional consumables (wafers or PDMS) or services performed by the MNTC staff (i.e. dicing and photomasks).

 

Equipment Group 0

Internal Rate

External Rate

Service Center Rate

Dektak Profilometer

$0

$0

$60/hour + Internal or External Rate

Filmetrics

$0

$0

$60/hour + Internal or External Rate

Optical Microscopes (excluding the Zeiss Axioskop)

$0

$0

$60/hour + Internal or External Rate

Stereoscopes

$0

$0

$60/hour + Internal or External Rate

Toho Thin Film Stress Measurement System

$0

$0

$60/hour + Internal or External Rate

Solvent Wet Bench

$0

$0

$60/hour + Internal or External Rate

Spin Rinse Dryers

$0

$0

$60/hour + Internal or External Rate

Vacuum Ovens

$0

$0

$60/hour + Internal or External Rate

Spinners

$0

$0

$60/hour + Internal or External Rate

Developer Wet Bench (LF8-1A Solvent Develop Hood)

$0

$0

$60/hour + Internal or External Rate

Developer Wet Bench (115X Base Develop Hood)

$0

$0

$60/hour + Internal or External Rate

Spinner Benches (153X Hot Plate Spinner Combo)

$0

$0

$60/hour + Internal or External Rate

Solvent Bench (301 Solvent MEMS in wet etch bay)

$0

$0

$60/hour + Internal or External Rate

 

Equipment Group 1

Internal Rate

External Rate

Service Center Rate

RTP/RTA

$30/sample

$41/sample

$60/hour + Internal or External Rate

Yes Polyimide Oven

$30/batch

$41/batch

$60/hour + Internal or External Rate

Yes Image Reversal Oven

$30/batch

$41/batch

$60/hour + Internal or External Rate

Intelligent Micro-Patterning System (IMP)

$30/sample

$41/sample

$60/hour + Internal or External Rate

March RIE

$30/sample

$41/sample

$60/hour + Internal or External Rate

HF-8 Axic Barrel Asher

$30/batch

$41/batch

$60/hour + Internal or External Rate

Reynolds Electroplating Bench

$30/batch

$41/batch

$60/hour + Internal or External Rate

Zeiss Axioskop

$30/sample

$41/sample

$60/hour + Internal or External Rate

QFI Thermal Imaging System

$30/session

$41/session

$60/hour + Internal or External Rate

Ion Mill

$30/sample

$41/sample

$60/hour + Internal or External Rate

Zygo Optical Laser Profilometer

$30/sample

$41/sample

$60/hour + Internal or External Rate

Flip Chip Bonder

$30/sample

$41/sample

$60/hour + Internal or External Rate

High Speed Camera

$30/sample

$41/sample

$60/hour + Internal or External Rate

 

Equipment Group 2

Internal Rate

External Rate

Service Center Rate

Wire / Wedge Bonding

$40/session

$54/session

$60/hour + Internal or External Rate

Tube Furnaces

$40/batch

$54/batch

$60/hour + Internal or External Rate

Photolithography

$40/sample

$54/sample

$60/hour + Internal or External Rate

Parylene System

$40/batch

$54/batch

$60/hour + Internal or External Rate

LF-8 2 RCA Clean Hood (RCA Cleaning)

$40/batch

$54/batch

$60/hour + Internal or External Rate

305 Acid Hood (Nanostrip, Aluminum Etch, Chrome Etch, BOE)

$40/batch

$54/batch

$60/hour + Internal or External Rate

307 Base Hood (KOH, TMAH)

$40/batch

$54/batch

$60/hour + Internal or External Rate

308 EDP Etch Hood (Gold Etch, Copper Etch)

$40/batch

$54/batch

$60/hour + Internal or External Rate

 

Equipment Group 3

Internal Rate

External Rate

Service Center Rate

Oxford PECVD /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Beneq ALD /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Lesker PVD 75 /sample (*extra for gold and platinum)

$50/sample

$68/sample

$60/hour + Internal or External Rate

Technics Sputterer /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Denton Thermal Evaporator /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

MVD /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Lesker E-beam /sample (*extra for gold and platinum)

$50/sample

$68/sample

$60/hour + Internal or External Rate

DRIE /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Xactix XeF2 Isotropic Etching /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Raith 150 /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Suss Bonder /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Critical Point Dryer /sample

$50/sample

$68/sample

$60/hour + Internal or External Rate

Trion Metal Etcher

$50/sample

$68/sample

$60/hour + Internal or External Rate

C) Additional Fees

Training:

Internal & External Users:

$60/hour and will not include the tool usage fee

*Gold Deposition (not included in the monthly cap):

*Platinum Deposition (not included in the monthly cap):

Internal Users:

External Users:

Internal Users:

External Users:

$15/minute

$20/minute

$20/minute

$27/minute

Dicing**:

Internal Users:

$50/sample performed by the MNTC staff

External Users:

$68/sample performed by the MNTC staff

PDMS Pails**:

Internal Rate:

$400/pail

External Rate:

$544/pail

Small PDMS Kit**:

Internal Users Only:

$65/kit
Dewar Fill
$45/fill

 

Wafers**

Internal Rate

External Rate

Non-Oxidized Prime SSP Wafers

$25/wafer

$34/wafer

Oxidized Prime SSP Wafers

$35/wafer

$48/wafer

Non-Oxidized Prime DSP Wafers

$35/wafer$48/wafer

Oxidized Prime DSP Wafers

$45/wafer$61/wafer
Borosilicate Glass Wafers

$25/wafer

$34/wafer

 

Photomasks, Greyscale Photomasks & E-beam Lithography**:

First hour flat rate

Rate after 1st Hour

Internal Rate (MNTC staff provided service)

$100

$40/hour

External Rate (MNTC staff provided service)

$136

$54/hour

**not included in the monthly cap

General Cleanroom SuppliesInternal RateExternal Rate

4” Wafer Container

$4/each

$5.44/each

4” Wafer Container Lid

$4/each

$5.44/each

8.5 “×11” Cleanroom Notebook

$12/each

$16.32/each

Metal Tipped Wafer Tweezers$45/each

$61.20/each

Plastic Tipped Wafer Tweezers

$45/each

$61.20/each

Replacement Plastic Wafer Tips

$15/each

$20.40/each

Petri Dishes$3/each

$4.08/each

Microscope Slides$5/box

$6.80/box

 

External rates apply to clients outside of the University of Louisville.

External Rates do not include Kentucky Sales Tax of 6%.