With the expansion of the UofL Micro/NanoTechnology Cleanroom (MNTC), there is the need for assistance with both equipment installation/characterization and process development.  Therefore, the MNTC would like to offer Independent Study opportunities for interested and appropriately-trained students.  There would be no cleanroom service center fee charged during this activity because you would be benefiting the MNTC and its general user base.

Possible Independent Study Projects

a)     Installation and characterization of Lexmark Axxis RIE system(s)

b)     Installation and characterization of Electroplating Bench

c)     Characterization of new LPCVD System

d)     Process development to obtain stress-free PECVD/LPCVD films

e)     GLAD - glancing angle deposition

f)       Installation and characterization of Kasper aligner

g)     SEM setup and characterization

Policy

a)     Cleanroom Committee (CC) endorses a specific project list and publishes it on the web for the students to see (such as above).

b)     The interested student must be championed by a member of the CC (champion does not need to be his/her advisor).

c)     The CC champion/representative presents the resume of the student to CC along with the proposed project, and the merits of the proposal are discussed.

d)     If acceptable, the student presents a plan of action with anticipated outcomes to the CC (ABET required).

e)     If acceptable, the student performs the work and at a minimum produces a SOP, written report, and gives an oral presentation to the CC upon completion of the project

Cleanroom Committee

Dr. Kevin Walsh

Dr. Rob Keynton

Dr. Shamus McNamara

Mark Crain