Introduction
The Micro/Nano Technology Service Center is utilized for both research and instructional purposes. It provides a state-of-the-art cleanroom for teaching both the fundamental and current fabrication techniques used to manufacture integrated circuits (ICs), discrete microelectronic devices, MEMS devices such as sensors and actuators, and various electro-optic devices. Since the Service Center houses the only microfabrication cleanroom facility in the entire state of Kentucky, it also serves as an appropriate setting for technology transfer of information and projects related to microfabrication.
Students are able to obtain valuable training in leading edge technology currently lacking in our state. In addition, it is an appropriate setting for new research in the microfabrication field. The laboratory houses a wide range of processing, packaging, and test equipment. As such, it is of tremendous value to a wide range of disciplines. Specifically, it is currently serving as a center for research activity in the areas of micromachined sensors and actuators, electro-optic devices, special-purpose microelectronic devices, planar waveguides, chemical transducers, microstrip and microgap radiation detectors, micromachined nozzles, and micromachined ink-jet printheads.
ACTIVITIES
The Micro/Nano Technology Service Center is utilized for the fabrication, packaging, and testing of various microelectronic devices and circuits, electro-optic devices, micromachined sensors and actuators, and various other MEMS (microelectromechanical) devices and structures. Due to stringent processing requirements, the lab is designed to meet class 1000 clean room specifications throughout with certain areas and rooms in the lab satisfying class 100 specifications. Activities that can be performed in the Microfabrication Laboratory include: photolithography, oxidation, thermal diffusion, evaporation, sputtering, metalization, spinning, chemical vapor deposition (CVD), anisotropic and isotropic etching, reactive ion etching (RIE), bulk and surface micromachining, silicon-silicon bonding, electrostatic bonding, wire bonding, dicing, packaging, probe inspection, measurement and testing.
EDUCATIONAL IMPACT
The development of The Micro/Nano Technology Service Center provided a quantum leap in the quality of education available to students at the University of Louisville and the state of Kentucky. The largest university cleanroom in Kentucky is that of the Micro/Nano Technology Service Center . The current activity in the Belknap Research Building fits in well with the national interest in microfabrication as a strategic research area. It is clear that microfabrication techniques and applications are and will continue to have an important impact upon our technology base. Graduate and undergraduate students who are exposed to microfabrication activities will emerge with real experience in new technology and its applications.
