Micro/Nano Technology Center

The University of Louisville's Cleanroom and Supporting Laboratories

About Us

The Micro/Nano Technology Center is utilized for both research and instructional purposes. It provides a state-of-the-art 10,000 ft2 cleanroom for teaching both the fundamental and current fabrication techniques used to manufacture integrated circuits (ICs), discrete microelectronic devices, MEMS devices such as sensors and actuators, and various electro-optic devices. The cleanroom facility also serves as an appropriate setting for technology transfer of information and projects.

Students are able to obtain valuable training in leading edge technologies and is an appropriate setting for new research in micro and nanofabrication. The cleanroom houses a wide range of processing, packaging and test equipment, which is of tremendous value to a wide range of disciplines. Specifically, it is currently serving as a center for research activity in the areas of micromachined sensors and actuators, electro-optic devices, special-purpose microelectronic devices, planar waveguides, chemical transducers, microstrip and microgap radiation detectors, micromachined nozzles, and micromachined ink-jet printheads.


The Micro/Nano Technology Center is utilized for the fabrication, packaging, and testing of various microelectronic devices and circuits, electro-optic devices, micromachined sensors and actuators, and various other MEMS (microelectromechanical) devices and structures. Due to stringent processing requirements, the lab is designed to meet class 100 and 1000 clean room specifications. Processes that can be performed in the facility include: photolithography, oxidation, thermal diffusion, evaporation, sputtering, metallization, spinning, chemical vapor deposition (CVD), anisotropic and isotropic dry etching, reactive ion etching (RIE), bulk and surface micromachining, silicon-silicon bonding, electrostatic bonding, wire bonding, dicing, packaging, probe inspection, measurement and testing.


Development of the Micro/Nano Technology Center provided a quantum leap in education quality available to students at the University of Louisville and the state of Kentucky. Current activities in the John W. Shumaker Research Building fits in well with national interests in micro and nanofabrication as a strategic research area. It is clear these techniques and applications are and will continue to have an important impact upon our technology base. Graduate and undergraduate students who are exposed to fabrication activities of this sort will emerge with real experience in new technology and applications.