Project 1: Growth of Nanostructures by Glancing Angle Deposition or GLAD (Prof. Kevin Walsh, ECE)

jjjGlancing angle deposition or GLAD is a very interesting fabrication strategy for producing unique nanostructures without the need for expensive and time-consuming processes, such as lithography, patterning, etching, and electroplating. Although GLAD was first discovered in 1959 by Smith, Knorr and Hoffman, very little has been done with this interesting technology since that time.  Smith, Knorr and Hoffman discovered that if a substrate is placed at an angle to the deposition source (as seen in the figure), it was possible to obtain naturally-occurring columnar structures, instead of uniform thin films as originally expected. Then, by adding substrate rotation to the deposition tool, even more interesting nanostructures could be obtained (see figures).  In this research, the REU student will work with our professional cleanroom staff and utilize our ebeam evaporation system in the UofL cleanroom to produce a variety of GLAD nanostructures, including nano-columns, tilted nano-columns, and nano-springs.  These structures will then be imaged by the student using scanning electron microscopy (SEM) and cataloged appropriately. GLAD nanostructures have potential applications to the fields of sensing, optics, electronics, and NEMS (nano electro mechanical systems).

Dr. Kevin Walsh, Dr. Shamus McNamara, Dr. Xiaojin Wang, & Dr. Julia Aebersold.Images from University of Alberta (

Knorr, T. G. and Hoffman, R. W., Physical Review, 113:1039, 1959

 Smith, D. O. Appl. Phys., 30:264, 1959