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Microtechnology Fabrication

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    Micro/Nano Technology Center

    • MEMS fabrication by photolithographic processing.
    • Deep etching, back-to-front side aligned patterns.
    • Glass-silicon wafer bonding.
    • Photo-mask using a submicron resolution Heidelberg Instruments laser pattern generator.
    Director: Kevin Walsh, Ph.D
    Contacts: Julia Aebersold, Ph.D, Manager, 502-852-1572, Email
    Location: Room no. 121 - Shumaker Research Building Map
    Website: louisville.edu/micronano/
    Video: View

AFM (Atomic Force Microscope)

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