ECE 544

Microfabrication/MEMS Laboratory

The purpose of this laboratory is to provide a valuable hands-on laboratory cleanroom experience in the areas of microfabrication and MEMS technology. During the semester, a MEMS device will be designed, fabricated, packaged and tested using the MNTC’s resources.

For more details please refer to the ECE 544 Syllabus.

All students are required to undergo Safety Training to ensure a safe environment for all cleanroom users as well as pass the Safety Quiz before they are admitted to the cleanroom.

Lab Materials