MEMS Computer-Aided Design Facility

Eight high-end workstations located in the Shumaker Research Building are dedicated to running a suite of commercial software packages used for the design, simulation + layout of MEMS and microelectronic devices. CoventorWare© is a MEMS finite element modeling software which has modules for simulation of mechanical, electrical, thermal, and fluidic phenomenon in the micro regime.  Both pre-processing (model design and generation) and post-processing (simulation and data extraction) is accomplished on the workstations.  The workstations are also equipped with Tanner Tools including L-EDIT for device layout, Silvaco software for semiconductor fabrication simulation, IntelliSuite for MEMS design & modeling, and T-Spice Software for circuit modeling. In addition, the licensing configuration for the software effectively allows campus-wide access to the software, which is particularly advantageous for inspecting results at locations away from the more powerful systems.

Location

Shumaker Research Bldg. Room 226

Core Scientific and Technical Staff

  • Director, Dr. Kevin M. Walsh
  • System Programmer, Dr. Thomas Roussel
  • Lab/Software-Use Supervisor, Ana Sanchez

Computer Facilities

The CoventorWare© software is installed on a 2.8 GHz Intel Pentium IV workstation with one GB of RAM and 200 GB of disk space for data storage and a similarly configured 1.4 GHz Intel Dual Xeon® system.  A 700 MHz Intel Dual Pentium III and a 1.8 GHz AMD Dual Athlon MP, each with one GB of RAM are dedicated to students' use.  The CoventorWare© software is currently licensed to the University through 2014

In addition to the CoventorWare© software, the lab has 20 licenses for Athena (Silvaco), a semiconductor fabrication process simulation package.  The MEMS research group also has 10 L-EDIT (Tanner) licenses for layout generation, 15 IntelliSuite licenses for MEMS desing & modeling, 2 T-Spice (Tanner) licenses for circuit modeling, and a site license of LabView® (National Instruments) for data acquisition.

For More Information

Contact Ana Sanchez via email ana.sanchez@louisville.edu or phone (502)852-1568