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Lutz Micro/Nano Technology Center


The Lutz Micro/Nano Technology Center (MNTC) is composed of 3 core facilities. At the heart of the MNTC is a new state-of-the-art $25M, class 100/1000 cleanroom for prototyping miniature devices and systems. This AGI-designed, 10,000 sq. ft. facility opened in 2006 and is strategically divided into 7 dedicated bays containing some of the most advanced micro/nano fabrication equipment in the world. Complementary to the MNTC cleanroom are 2 other micro/nano core facilities - the MEMS Modeling and TCAD Lab for the design, layout and simulation of micro/nano devices and the Micro/Nano Post-Processing Lab for the packaging and testing of completed components. All 3 micro/nanotechnology core facilities are utilized for both research and instructional purposes. They provide a state-of-the-art environment for teaching both the fundamental and current fabrication techniques used to manufacture integrated circuits (ICs), discrete microelectronic devices, MEMS devices such as sensors and actuators, and various electro-optic devices. Since the MNTC houses the only general-purpose microfabrication cleanroom facility in the state of Kentucky, it also serves as an appropriate setting for technology transfer of information and projects related to micro/nano-fabrication. Students are able to obtain valuable training in a leading edge technology currently lacking in our state. In addition, it is an appropriate setting for cutting edge, high-risk research in the micro/nanotechnology field. The MNTC facility houses a wide range of processing, packaging, and test equipment, and is consequently of tremendous value to a broad and diverse range of disciplines. Specifically, it is currently serving as a center for research activity in the areas of micromachined sensors and actuators, electro-optic devices, special-purpose microelectronic devices, planar waveguides, chemical transducers, microstrip and microgap radiation detectors, micromachined nozzles, and micromachined ink-jet printheads.

Dr. Kevin M. Walsh
Director, Lutz Microfabrication Center
Department of Electrical and Computer Engineering
University of Louisville
Louisville, Kentucky 40292, USA

Tel:  (502) 852-0826
Fax: (502) 852-8128


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