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ME 659 Micro Pressure and Flow Sensors for Biomedical Applications


Catalog Description

ME 659 Micro Pressure and Flow Sensors for Biomedical Applications (3). Application of microtechnologies to the development of practical pressure and flow sensors for biomedical applications. Overview of micro-fabrication processes and conventional flow/pressure sensing devices. Application-specific criteria supporting the need for miniaturization. Design principles and constraints. Students are required to design either a micro flow or pressure sensor for a specific biomedical application.

Prerequisites by Topic

  1. Advanced fluid mechanics
  2. Advanced mechanics of materials
  3. Engineering measurements

Textbook

Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, First Edition, McGraw-Hill, 1998.

References

  1. Readings from current technical literature in the area of microtechnology.
  2. Marc Madou, Fundamentals of Microfabrication, First Edition, CRC Press, 1997.

Coordinator

R.S. Keynton, Associate Professor of Bioengineering.

Course Objectives

  1. Identify and describe the fundamental principles of operation of conventional flow and pressure sensing devices.
  2. Describe the advantages and disadvantages of current micro flow and pressure sensors.
  3. Define the processing steps for fabricating a micro flow and pressure sensors.
  4. Establish device testing protocol to evaluate transducer performance.
  5. Design a flow or pressure sensor for a specific biomedical application.

Topics

  1. Principles of operation of ultrasonic Doppler velocimetry, laser Doppler velocimetry, and hot film anemometry (5 classes)
  2. Principles of operation of piezoelectric, piezoresistive, strain gauge and capacitive pressure sensors (5 classes)
  3. Flat, annular and corrugated diaphragm design (5 classes)
  4. Flow and pressure transducer design (5 classes)
  5. Methods for evaluating flow and pressure transducer performance (5 classes)
  6. Review and critique over 20 journal articles related to micro flow and pressure sensors (5 classes)
  7. Examinations (2 classes and 2½ hours)

Computer Use

PC and Unix-based software packages will be used in support of course design activities.

Laboratory Schedule

Three 50 minute sessions per week devoted to lecture, discussion, and problem solving.

Professional Component Contribution

Engineering science: 2 credits, engineering design: 1 credit.

Relationship to Program Objectives

This course supports Mechanical Engineering program objectives by developing:

  • An ability to apply knowledge of mathematics, science, and engineering in the field of mechanical engineering.
  • An ability to design a system, component, or process to meet desired needs in the field of mechanical engineering.
  • An ability to function on multi-disciplinary teams.
  • An ability to identify, formulate and solve problems in the field of mechanical engineering.
  • An ability to communicate effectively.
  • A recognition of the need for, and an ability to engage in, life-long learning in the field of mechanical engineering.
  • An ability to use the techniques, skills, and modern tools necessary for the practice of mechanical engineering.

Prepared by R.L. Keynton, May 2006

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