Micro/Nano Technology

Micro/Nano Technology Center

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  • MEMS fabrication by photolithographic processing.
  • Deep etching, back-to-front side aligned patterns.
  • Glass-silicon wafer bonding.
  • Photo-mask using a submicron resolution Heidelberg Instruments laser pattern generator.
    • Contact:
    • Julia Aebersold, Ph.D, Manager, 502-852-1572, Email
    • Location:
    • Room no. 121 - Shumaker Research Building Map

    Earl and Mary Lou Kohnhorst BioMEMS Cardiovascular Mechanics Lab

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    • Biomedical MicroElectroMechanical Systems (BioMEMS)
    • Micro Total Analysis Systems (uTAS)
    • Cardiovascular mechanics
    • Experimental and computational microfluidics
    • Acoustic transducer design and fabrication
    • Experimental fluid mechanics.

    Micro/Nano Technology Center

    • Contact:
    • Julia Aebersold, Ph.D, Manager, 502-852-1572, Email
    • Location:
    • Shumaker Research Building, Room 233 2210, South Brook St, Louisville, KY