Rates

Micro/Nano Technology Center Rates (as of 9/1/2016)

Download a pdf copy of the MNTC Rates

Clients of the MNTC will be charged a daily cleanroom access fee and associated equipment fees. All clients will be charged including faculty.

Daily Access Fee for the Cleanroom:

Internal User:   $25/day    External User:   $34/day

Equipment Usage Fee: The usage rates are defined below for internal users, external users and services. A cap of $1,500 per month per researcher will be implemented for equipment usage, access fees and training for internal users only. This cap does not include consumables (wafers, wafer containers, tweezers, etc.) or services performed by the MNTC staff (i.e. dicing and photomasks). A cap is not instituted for external users.

 

Equipment

Internal Rate

External Rate

Service Center Rate

Flip Chip Bonder

$0.50/min

$0.75/min

$60/hour + Internal or External Rate

QFI Thermal Imaging System

$0.50/min

$0.75/min

Zygo Optical Laser Profilometer

$0.50/min

$0.75/min

Critical Point Dryer

$0.50/min

$0.75/min

Ball /Wedge Bonder

$0.60/min

$0.90/min

$60/hour + Internal or External Rate

Hi-Speed Camera

$0.60/min

$0.90/min

March RIE

$0.60/min

$0.90/min

Rapid Temperature Processing (RTP/RTA)

$0.60/min

$0.90/min

ABM Aligner

$0.70/min

$1.05/min

$60/hour + Internal or External Rate

DRIE

$0.70/min

$1.05/min

E-beam Evaporator (**extra for Au)

$0.70/min

$1.05/min

Molecular Vapor Deposition (MVD)

$0.70/min

$1.05/min

Oxford PECVD

$0.70/min

$1.05/min

Lesker PVD 75 (**extra for Au and Pt)

$0.70/min

$1.05/min

Denton Thermal Evaporator

$0.70/min

$1.05/min

Suss Aligner

$0.70/min

$1.05/min

Suss Bonder

$0.70/min

$1.05/min

Technics Sputtering Sysytem

$0.70/min

$1.05/min

Photoresist Spinners

$0.70/min

$1.05/min

Trion Metal Etcher

$0.70/min

$1.05/min

Hitachi SEM

$1.00/min

$1.50/min

$60/hour + Internal or External Rate

Xactix XeF2 Isotropic Etching

$1.00/min

$1.50/min

Photoresist Spinners

$1.00/min

$1.50/min

Beneq ALD

$1.00/min

$1.50/min

 

Additional Fees

Internal Rate

External Rate

Training

$60/hour and is not included with tool usage fee

**Gold/Platinum Deposition

$20/0.10 gram

$30/0.10 gram

Dicing (Process performed by MNTC staff ONLY, Service fee included)

$60/1st hour flat rate

$1/minute after 1st hour

$85/1st hour flat rate

$1/minute after 1st hour

Photomasks, Greyscale Photomasks (Process performed by MNTC staff ONLY, Service fee included)

$100/1st hour flat rate

$40/hour after 1st hour

$136/1st hour flat rate

$54/hour after 1st hour

Dewar Fill

$45/fill

N/A

 

Equipment

Internal Rate

External Rate

Service Center Rate

Intelligent Micro-Patterning System (IMP)

$30/sample

$41/sample

$60/hour + Internal or External Rate

HF-8 Axic Barrel Asher

$30/batch

$41/batch

Reynolds Electroplating Bench

$30/batch

$41/batch

Tube Furnaces

$40/batch

$54/batch

LF-8 2 RCA Clean Hood (RCA Cleaning)

$40/batch

$54/batch

305 Acid Hood (Nanostrip, Aluminum Etch, Chrome Etch, BOE)

$40/batch

$54/batch

307 Base Hood (KOH, TMAH)

$40/batch

$54/batch

308 EDP Etch Hood (Gold Etch, Copper Etch)

$40/batch

$54/batch

YES Polyimide Oven

$45/batch

$65/batch

Parylene Deposition System $45/batch $65/batch


Consumables/Supplies

Wafers

Internal Rate

External Rate

4” Non-Oxidized Prime SSP Wafers

$25/wafer

$34/wafer

4” Oxidized Prime SSP Wafers

$35/wafer

$48/wafer

4” Non-Oxidized Prime DSP Wafers

$35/wafer

$48/wafer

4” Oxidized Prime DSP Wafers

$45/wafer

$61/wafer

6” Non-Oxidized Wafers

$35/wafer

$43/wafer

4” Borosilicate Glass Wafers

$25/wafer

$34/wafer

General Cleanroom Supplies

Internal Rate

External Rate

4” Wafer Container

$4/each

$5.44/each

4” Wafer Container Lid

$4/each

$5.44/each

8.5“×11” Cleanroom Notebook

$12/each

$16.32/each

Metal Tipped Wafer Tweezers

$50/each

$68.00/each

Plastic Tipped Wafer Tweezers

$50/each

$68.00/each

Petri Dishes

$3/each

$4.08/each

Microscope Slides

$5/box

$6.80/box

Usage fee are not assessed on these items, but does not exclude MNTC labor fee;

Equipment

Dektak Profilometer

Filmetrics

Optical Microscopes

Stereoscopes

Toho Thin Film Stress Measurement System

Spin Rinse Dryers

Vacuum Ovens

Spin-Rinse-Dryers

Vacuum Ovens

Four Point Probe

Developer Wet Bench (LF8-1A Solvent Develop Hood)

Developer Wet Bench (115X Base Develop Hood)

Spinner Benches (153X Hot Plate Spinner Combo)

Solvent Bench (301 Solvent MEMS in wet etch bay)