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Microfabrication Course (500).htm
University of Louisville
Microfabrication Course (EE500)
All experiments are under construction and can change at any time
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Course Syllabus
Course Outline
Microfabrication Text Content
Experiment 1 - Cleanroom Safety, Protocols, and Operational Procedures
Experiment 2 - Introduction to Basic Cleanroom Equipment
Experiment 3 - Initial Wafer Clean and Wafer Analysis
Experiment 4 - Device Layout using L-Edit®
Experiment 5 - Process Modelling using Process Wizard
Experiment 6 - Oxidation
Experiment 7 - Photolithography
Experiment 8 - Thermal Diffusion
Experiment 9 - Metal Deposition using Sputtering
Experiment 10 - Metal Patterning using Wet Etching
Experiment 11 - Bulk micromachining
Experiment 12 - Electrostatic Bonding
Experiment 13 - Packaging (Dicing, Mounting, & Wire bonding)
last modified: Sun Jun 29 13:47:50 EDT
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