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Photolithography
Wafer Thermal Processing
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Photolithography
Wafer Thermal Processing
Testing & Characterization
Etching, Machining, & Bonding
Packaging
Electron Microscopy & Imaging
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L-Edit design
Photoresist Profiles for DRIE S1827 and AZ4620
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How to Become a User
FOM- Facility Online Manager
Standard Operating Procedures (SOP's)
Characterization Data
Dicing Request
Photomask Request
Cleanroom Safety Guidelines
SDS Database
L-Edit design
Photoresist Profiles for DRIE S1827 and AZ4620
PEALD and ALD SOP
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MNTC Rates Effective 6-1-2023
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MNTC Rates Effective 6-1-2023
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Self - Guided Tour
ECE 544 Microfabrication/MEMS Laboratory
Inquiry form
You may contact the MNTC by submitting this inquiry form with a question or
short description of desired processes.
Name
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Processes you are interested in
Deposition
Wet Etching
Dry Etching
Lithography
Metrology
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Other
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